1 results
Temperature Dependence of Etch Rate and Residual Damage in Reactively Ion Etched GaAs and AlGaAs
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 129 / 1988
- Published online by Cambridge University Press:
- 25 February 2011, 489
- Print publication:
- 1988
-
- Article
- Export citation