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Atomic Layer Deposition of Cerium Dioxide Film on TiN and Si Substrates: Structural and Chemical Properties
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- Journal:
- MRS Advances / Volume 2 / Issue 52 / 2017
- Published online by Cambridge University Press:
- 05 June 2017, pp. 3005-3010
- Print publication:
- 2017
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- Article
- Export citation