3 results
Accurate Monte Carlo Simulation of Ion Implantation into Arbitrary 1D/2D/3D Structures for Silicon Technology
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- Journal:
- MRS Online Proceedings Library Archive / Volume 810 / 2004
- Published online by Cambridge University Press:
- 17 March 2011, C6.5
- Print publication:
- 2004
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Three Dimensional Modeling of Anisotropic Stress Effects in Thermal Oxidation of Silicon
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- Journal:
- MRS Online Proceedings Library Archive / Volume 731 / 2002
- Published online by Cambridge University Press:
- 01 February 2011, W8.5
- Print publication:
- 2002
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Atomistic Modeling of the Ion Implantation Step Within a 2D Process Simulator
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- Journal:
- MRS Online Proceedings Library Archive / Volume 490 / 1997
- Published online by Cambridge University Press:
- 10 February 2011, 21
- Print publication:
- 1997
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