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Accurate Monte Carlo Simulation of Ion Implantation into Arbitrary 1D/2D/3D Structures for Silicon Technology

  • Shiyang Tian (a1), Victor Moroz (a2) and Norbert Strecker (a2)


We present an integrated Monte Carlo implant simulator which is capable of accurately simulating ion implantation into any amorphous materials and crystalline Si for 1D/2D/3D structures with arbitrary geometry and topography. With this simulator, we investigate some practical examples which reveal interesting 2D/3D effects, and demonstrate the importance of <110> channeling for sub-100nm silicon technology.



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[1] Obradovic, B., Wang, G., Chen, Y., Li, D., Snell, C., and Tasch, A. F., UT-MARLOWE 5.0 with TOMCAT. The University of Texas at Austin, Austin, Texas, 1999.
[2] Hobler, G., Simionescu, A., Palmetshofer, L., Tian, C., and Stingeder, G., J. Appl. Phys. 77, 3697 (1995).
[3] Posselt, M., Rad. Effs. and Defs. in Solids 130–131, 87 (1994).
[4] Schmidt, B., Posselt, M., Strecker, N., and Feudel, T., Comp. Mat. Sci. 11,87 (1998).
[5] Li, D., Lin, L., Wang, G., Chen, Y., Shrivastav, G., Oak, S., Tasch, A. F., Banerjee, S. K., IEDM Tech. Dig., pp. 38.6.1-4, 2001.
[6] Hoessinger, A., PhD thesis, Technical University Vienna, 2000.
[7] Borland, J. O., Moroz, V., Wang, H., Maszara, W., and Iwai, H., Solid State Technol., p. 52, June 2003.
[8] Synopsys, Inc., Mountain View, CA, Taurus Process Reference Manual, December 2003.
[9] Tian, S., J. Appl. Phys. 93, 5893 (2003). S. Tian, Nucl. Instr. Meth. Phys. Res. B 215, 403 (2004).
[10] Yang, S.-H., Lim, D., Morris, S. J., and Tasch, A. F., Nucl. Instr. Meth. Phys. Res. B 102, 242 (1995).
[11] Bohmayr, W., Burenkov, A., Lorenz, J., Ryssel, H., and Selberherr, S., IEEE Trans. Semicond. Manu. 8, 402 (1995).
[12] Beardmore, K. M. and Grønbech-Jensen, N., Nucl. Instr. Meth. Phys. Res. B 153, 391 (1999).


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