2 results
Formation of a Thermally Stable NiSi FUSI Gate Electrode by a Novel Integration Process
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- Journal:
- MRS Online Proceedings Library Archive / Volume 958 / 2006
- Published online by Cambridge University Press:
- 01 February 2011, 0958-L06-08
- Print publication:
- 2006
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- Article
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The Copper Corrosion and Sulfur Contamination Generated by a Three-Step Copper Chemical-Mechanical Polishing Process
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- Journal:
- MRS Online Proceedings Library Archive / Volume 914 / 2006
- Published online by Cambridge University Press:
- 01 February 2011, 0914-F09-10
- Print publication:
- 2006
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- Article
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