7 results
Application of Aluminum Nitride Thin Film for Micromachined Ultrasonic Transducers
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- Journal:
- MRS Online Proceedings Library Archive / Volume 892 / 2005
- Published online by Cambridge University Press:
- 01 February 2011, 0892-FF13-01
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- 2005
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Fabrication of Anatase TiO2 Thin Film Using Pulsed DC Magnetron Sputtering
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- Journal:
- MRS Online Proceedings Library Archive / Volume 848 / 2004
- Published online by Cambridge University Press:
- 01 February 2011, FF3.20
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- 2004
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Development of an AlN Deep UV Detector for Space Application
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- Journal:
- MRS Online Proceedings Library Archive / Volume 639 / 2000
- Published online by Cambridge University Press:
- 17 March 2011, G6.33
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- 2000
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AlN Acoustic Wave Sensors Using Excimer Laser Micromachining Techniques
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- Journal:
- MRS Online Proceedings Library Archive / Volume 639 / 2000
- Published online by Cambridge University Press:
- 17 March 2011, G11.28
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- 2000
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A Study of Pt/AlN/6H-SiC MIS Structures for Device Applications
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- Journal:
- MRS Online Proceedings Library Archive / Volume 622 / 2000
- Published online by Cambridge University Press:
- 15 March 2011, T6.5.1
- Print publication:
- 2000
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Temperature Effect on the Quality of A1N thin Films
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- Journal:
- Materials Research Society Internet Journal of Nitride Semiconductor Research / Volume 4 / Issue S1 / 1999
- Published online by Cambridge University Press:
- 13 June 2014, pp. 142-148
- Print publication:
- 1999
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Temperature Effect on the Quality of Ain Thin Films
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- Journal:
- MRS Online Proceedings Library Archive / Volume 537 / 1998
- Published online by Cambridge University Press:
- 15 February 2011, G3.7
- Print publication:
- 1998
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