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S126 Invited—Residual Stress Measurements on Thin Films with a Focused Ion Beam Equipment

Published online by Cambridge University Press:  20 May 2016

N. Sabaté
Affiliation:
CNM-CSIC, Barcelona, Spain
C. Cané
Affiliation:
CNM-CSIC, Barcelona, Spain
I. Gràcia
Affiliation:
CNM-CSIC, Barcelona, Spain
D. Vogel
Affiliation:
IZM-FHG, Berlin, Germany
A. Gollhardt
Affiliation:
IZM-FHG, Berlin, Germany
B. Michel
Affiliation:
IZM-FHG, Berlin, Germany
K. J. Kang
Affiliation:
Chonnam National University, Kwangju, Korea

Abstract

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Type
DENVER X-RAY CONFERENCE
Copyright
Copyright © Cambridge University Press 2008

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