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Formation of Hydrogen Related Defects and Nano-Voids in Plasma Hydrogenated ZnO

  • Reinhart Job (a1)


Using μ-Raman spectroscopy (μRS) and cathodoluminescence (CL) analyses, the impact of hydrogen plasma treatments on sintered zinc oxide (ZnO) samples was studied. 1 hour H-plasma treatments (150 W, 13.56 MHz) were applied at substrate temperatures between 250 °C and 500 °C. μRS and CL analyses show that plasma hydrogenation causes significant defects in ZnO samples; i) non-specified defect species are established with a maximal density upon H-plasma exposure at 350 °C substrate temperature, and ii) the formation of oxygen vacancies (VO) can be traced. Moreover, μRS reveals vibration modes of H2 molecules trapped in nano-voids. The experimental results indicate that those nano-voids are created by a coalescence of the VO defects.



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1. Özgür, Ü., Alivov, Ya. I., Liu, C., Teke, A., Reshchikov, M. A., , S., Avrutin, V., Cho, S.-J., Morkoç, H., J. Appl. Phys. 98, 041301 (2005).
2. McCluskey, M. D., Jokela, S. J., Oo, W. M. Hlaing, Mater. Res. Soc. Symp. Proc. 864, 493 (2005).
3. Clarke, D. R., J. Am. Ceram. Soc. 82, 485 (1999).
4. Job, R., Mater. Res. Soc. Symp. Proc. 957, 0957–K10 (2007).
5. Damen, T. C., Porto, S. P. S., Tell, B., Phys. Rev. 142, 570 (1966).
6. Calleja, J. M., Cardona, M., Phys. Rev. B 16, 3753 (1977).
7. Chen, Z. Q., Kawasuso, A., Xu, Y., Naramoto, H., Yuan, X. L., Sekiguchi, T., Suzuki, R., Ohdaira, T., Phys. Rev. B 71, 115213 (2005).
8. Ashkenov, N., Mbenkum, B. N., Bundesmann, C., Riede, V., Lorenz, M., Spemann, D., Kaidashev, E. M., Kasic, A., Schubert, M. Grundmann, M. Wagner, G., Neumann, H., Darakchieva, V., Arwin, H., Monemar, B., J. Appl. Phys. 93, 126 (2003).
9. Callender, R. H., Sussman, S. S., Selders, M., Chang, R. K., Phys. Rev. B 7, 3788 (1973).
10. Jeong, S.-H., Kim, J.-K., Lee, B.-T., J. Phys. D: Appl. Phys. 36, 2017 (2003).
11. Youn, C. J., Jeong, T. S., Han, M. S., Kim, J. H., J. Cryst. Growth 261, 526 (2004).
12. Gorelkinskii, Yu. V., Watkins, G. D., Phys. Rev. B 69, 115212 (2004).
13. Stoicheff, B. P., Can. J. Phys. 35, 730 (1957).
14. Sekiguchi, T., Ohashi, N., Terada, Y., Jpn. J. Appl. Phys. (Part 2) 36, L289 (1997).
15. Strzhemechny, Y. M., Nemergut, J., Smith, P. E., Bae, J., Look, D. C., Brillson, L. J., J. Appl. Phys. 94, 4256 (2003).


Formation of Hydrogen Related Defects and Nano-Voids in Plasma Hydrogenated ZnO

  • Reinhart Job (a1)


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