The bending curvatures of tri-material plates have been measured using in situ laser reflection technique at temperatures ranging from 20°C to 160°C. The tri-material structures are formed by attaching silicon wafers to ceramic substrates with die-attach adhesives from solder-like (elastic modulus ≈ 24 GPa) to gel-like (elastic modulus ≈ 0.003 GPa) characteristics. The temperature dependence of curvature as a result of the thermal expansion mismatch is measured. The structure bonded by the gel-like adhesive has substantially lower, about a factor of ten less, bending than the structures attached by the other two types of adhesives. We found good agreements between the measurements and the theoretical derivations by Suhir for the bending curvature of finite tri-material assembly.