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Co-Doping Characteristics of Si and Zn with Mg in P-Type GaN

  • K.S. Kim (a1), C.S. Oh (a1), M.S. Han (a1), C.S. Kim (a1), G.M. Yang (a2), J.W. Yang (a1), C.-H. Hong (a1), C.J. Youn (a1), K.Y. Lim (a1) and H.J. Lee (a1)...

Abstract

We investigated the doping characteristics of Mg doped, Mg-Si co-doped, and Mg-Zn codoped GaN films grown by metalorganic chemical vapor deposition. We have grown p-GaN film with a resistivity of 1.26 Ωm and a hole density of 4.3 × 1017 cm−3 by means of Mg-Si co-doping technique. The Mg-Si co-doping characteristic was also explained effectively by taking advantage of the concept of competitive adsorption between Mg and Si during the growth. For Mg-Zn co-doping, p-GaN showing a low electrical resistivity (0.7 Ωm) and a high hole concentration (8.5 × 1017 cm−3) was successfully grown without the degradation of structural quality of the film. Besides, the measured specific contact resistance for Mg-Zn co-doped GaN film is 5.0 × 10−4 cm2, which is lower value by one order of magnitude than that for only Mg doped GaN film (1.9 × 10−3 Ωm2).

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Co-Doping Characteristics of Si and Zn with Mg in P-Type GaN

  • K.S. Kim (a1), C.S. Oh (a1), M.S. Han (a1), C.S. Kim (a1), G.M. Yang (a2), J.W. Yang (a1), C.-H. Hong (a1), C.J. Youn (a1), K.Y. Lim (a1) and H.J. Lee (a1)...

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