No CrossRef data available.
Article contents
Towards Optimal Imaging and Microanalysis in Variable Pressure and Low Voltage SEM
Published online by Cambridge University Press: 14 March 2018
Extract
Image quality of 'secondary electron imaging' has been an ongoing operational issue with the variable pressure range of scanning electron microscopes (VPSEM), including the extended pressure range environmental or SEM. A second question that has received considerable attention concerns charge cancellation on insulators in VPSEM with particular reference to effects of charging on x-ray microanalytical results.
- Type
- Research Article
- Information
- Copyright
- Copyright © Microscopy Society of America 2005