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Towards Optimal Imaging and Microanalysis in Variable Pressure and Low Voltage SEM

Published online by Cambridge University Press:  14 March 2018

Brendan J Griffin
Brendan J Griffin*
Affiliation:
The University of Western Australia
*
bjg@cmm.uwa.edu.au

Extract

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Image quality of 'secondary electron imaging' has been an ongoing operational issue with the variable pressure range of scanning electron microscopes (VPSEM), including the extended pressure range environmental or SEM. A second question that has received considerable attention concerns charge cancellation on insulators in VPSEM with particular reference to effects of charging on x-ray microanalytical results.

Type
Research Article
Information
Microscopy Today , Volume 13 , Issue 2 , March 2005 , pp. 18 - 19
Copyright
Copyright © Microscopy Society of America 2005