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Towards Optimal Imaging and Microanalysis in Variable Pressure and Low Voltage SEM

  • Brendan J Griffin (a1)

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Image quality of 'secondary electron imaging' has been an ongoing operational issue with the variable pressure range of scanning electron microscopes (VPSEM), including the extended pressure range environmental or SEM. A second question that has received considerable attention concerns charge cancellation on insulators in VPSEM with particular reference to effects of charging on x-ray microanalytical results.

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Towards Optimal Imaging and Microanalysis in Variable Pressure and Low Voltage SEM

  • Brendan J Griffin (a1)

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