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Giving your SEM or FIB a Helping Hand
Published online by Cambridge University Press: 14 March 2018
Extract
Scanning electron microscopes have traditionally been used for observation and microanalysis of samples. Positioning and testing of samples has usually been performed out of the SEM chamber e.g. electrical test benches, sample preparation. However, due to miniaturization in semiconductor technology, optics, micro-mechanics, medicine, gene- and biotechnology, highly precise positioning techniques are becoming increasingly important. This may be performed using an optical microscope, or more commonly, within the SEM chamber itself.
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- Copyright © Microscopy Society of America 2008