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X-ray Spectrometry in the Era of Aberration-Corrected Electron Optical Beam Lines
Published online by Cambridge University Press: 10 May 2022
Abstract
Aberration correction in the analytical transmission electron microscope is most closely associated with improvements in high-resolution imaging. In this paper, the combination of that technology with new system designs, which optimize both electron optics and x-ray detection, is shown to provide more than a tenfold increase in performance over the last 25 years.
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- Copyright © The Author(s), 2022. Published by Cambridge University Press on behalf of the Microscopy Society of America
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