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Nanochemistry and Structure of Zr and Hf Based High Dielectric Constant Films

Published online by Cambridge University Press:  22 July 2003

M. Floyd ,
R.W. Carpenter ,
S. K. Dey ,
S. Marcus ,
H. de Waard  and
C. Werkhoven
M. Floyd
Affiliation:
Science and Engineering of Materials, Arizona State University, Tempe, AZ 85287-170
R.W. Carpenter
Affiliation:
Science and Engineering of Materials, Arizona State University, Tempe, AZ 85287-170
S. K. Dey
Affiliation:
Chemical and Materials Engineering Dept., Arizona State Univ., Tempe, AZ 85287-600
S. Marcus
Affiliation:
ASM America, Inc., Phoenix, AZ 85034-720
H. de Waard
Affiliation:
ASM America, Inc., Phoenix, AZ 85034-720
C. Werkhoven
Affiliation:
ASM America, Inc., Phoenix, AZ 85034-720

Abstract

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Abstract
Information
Microscopy and Microanalysis , Volume 9 , Issue S02 , August 2003 , pp. 466 - 467
Copyright
Copyright © Microscopy Society of America 2003