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Microstructural Evaluation of Compositional Fluctuations in AlGaN Grown on 6H-Sic Substrates

Published online by Cambridge University Press:  05 September 2003

R. Kröger
Affiliation:
Institute of Solid State Physics, University of Bremen, P.O. Box 330440, 28334 Bremen, Germany
S. Einfeldt
Affiliation:
Institute of Solid State Physics, University of Bremen, P.O. Box 330440, 28334 Bremen, Germany
Z. J. Reitmeier
Affiliation:
North Carolina State University, Dept. of Materials Science and Engineering, Campus Box 7907, Raleigh, NC 27695
D. Hommel
Affiliation:
Institute of Solid State Physics, University of Bremen, P.O. Box 330440, 28334 Bremen, Germany
R.F. Davis
Affiliation:
North Carolina State University, Dept. of Materials Science and Engineering, Campus Box 7907, Raleigh, NC 27695
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Abstract

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Type
Invited Papers
Copyright
Copyright © Microscopy Society of America 2003

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