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Highly Accurate Real Space Nanometrology Using Revolving Scanning Transmission Electron Microscopy

Published online by Cambridge University Press:  23 September 2015

J. H. Dycus ,
J. S. Harris ,
X. Sang ,
C. M. Fancher ,
S. D. Findlay ,
A. A. Oni ,
T. E. Chan ,
C. C. Koch ,
J. L. Jones  and
L. J. Allen
...Show all authors
J. H. Dycus
Affiliation:
Department of Materials Science and Engineering, North Carolina State University, Raleigh NC 27695, USA
J. S. Harris
Affiliation:
Department of Materials Science and Engineering, North Carolina State University, Raleigh NC 27695, USA
X. Sang
Affiliation:
Department of Materials Science and Engineering, North Carolina State University, Raleigh NC 27695, USA
C. M. Fancher
Affiliation:
Department of Materials Science and Engineering, North Carolina State University, Raleigh NC 27695, USA
S. D. Findlay
Affiliation:
School of Physics and Astronomy, Monash University, Victoria 3800, Australia
A. A. Oni
Affiliation:
Department of Materials Science and Engineering, North Carolina State University, Raleigh NC 27695, USA
T. E. Chan
Affiliation:
Department of Materials Science and Engineering, North Carolina State University, Raleigh NC 27695, USA
C. C. Koch
Affiliation:
Department of Materials Science and Engineering, North Carolina State University, Raleigh NC 27695, USA
J. L. Jones
Affiliation:
Department of Materials Science and Engineering, North Carolina State University, Raleigh NC 27695, USA
L. J. Allen
Affiliation:
School of Physics, University of Melbourne, Parkville, Victoria 3010, Australia
D. L. Irving
Affiliation:
Department of Materials Science and Engineering, North Carolina State University, Raleigh NC 27695, USA
J. M. LeBeau
Affiliation:
Department of Materials Science and Engineering, North Carolina State University, Raleigh NC 27695, USA

Abstract

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Abstract
Information
Microscopy and Microanalysis , Volume 21 , Supplement S3: Proceedings of Microscopy & Microanalysis 2015 , August 2015 , pp. 2245 - 2246
Copyright
Copyright © Microscopy Society of America 2015 

References

References:

[1] Pennycook, S. J. & Jesson, D. E., Physical Review Letters 64 (1990). p 938.CrossRefGoogle Scholar
[2] Dycus, J. H, et. al., Applied Physics Letters 102 (2013). p. 081601.Google Scholar
[3] Sang, X. & LeBeau, J. M., Ultramicroscopy (2014) 28–35.CrossRefGoogle Scholar
[4] Sang, X., et. al., Microscopy and Microanalysis (2014) 1764–1771.Google Scholar
[5] JHD, , WX, , XS, & JML, gratefully acknowledge support from the Air Force Office of Scientific Research (Grant No. FA9550-14-1-0182). SDF and LJA acknowledge support under the Australian Research Council's Discovery Projects funding scheme (DP140102538 and DP110102228). JHD acknowledges the National Science Foundation Graduate Research Fellowship (Grant DGE-1252376). The authors acknowledge the Analytical Instrumentation Facility (AIF) at North Carolina State University, supported by the State of North Carolina and the National Science Foundation.Google Scholar