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Broad Ion Beam Grid Cutting with Gatan PECS for 3D Scanning Electron Microscopy and Microanalysis of Integrated Circuits and Layered Structures

Published online by Cambridge University Press:  05 September 2003

W. Hauffe  and
D. Gloess
W. Hauffe
Affiliation:
Physics Department, Dresden University of Technology, D-01062 Dresden, Germany
D. Gloess
Affiliation:
Physics Department, Dresden University of Technology, D-01062 Dresden, Germany
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Abstract

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Type
Invited Papers
Information
Microscopy and Microanalysis , Volume 9 , Issue S03 , September 2003 , pp. 146 - 147
Copyright
Copyright © Microscopy Society of America 2003

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