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Thermodynamic analysis for the chemical vapor deposition of composite coatings from the Al–B–Ti–N–H–Cl–Ar system

Published online by Cambridge University Press:  31 January 2011

T.S. Moss ,
John A. Hanigofsky  and
W.J. Lackey
T.S. Moss
Affiliation:
Georgia Tech Research Institute, Georgia Institute of Technology, Atlanta, Georgia 30332
John A. Hanigofsky
Affiliation:
Georgia Tech Research Institute, Georgia Institute of Technology, Atlanta, Georgia 30332
W.J. Lackey
Affiliation:
Georgia Tech Research Institute, Georgia Institute of Technology, Atlanta, Georgia 30332
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Abstract

Thermodynamic calculations were performed for chemical vapor deposition in the Al–B–Ti–N–H–Cl–Ar system in order to determine the feasibility of multiphase deposition. Reagent species used were BCl3, AlCl3, TiCl4, NH3, H2, and Ar; B2 was substituted for BCl3 to determine changes in deposition efficiency. Temperature and input molar concentrations were varied over a range of values to establish relationships among solid deposits. Through deposition diagrams, molar efficiency plots, and partial pressure graphs, several two and three phase regions were found to exist. The calculations indicate that the following dispersed phase composites could be prepared: A1N + BN + TiN, BN + TiN, BN + TiB2, BN + TiB2 + TiN, and TiB2 + TiN.

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Articles
Information
Journal of Materials Research , Volume 7 , Issue 3 , March 1992 , pp. 754 - 764
Copyright
Copyright © Materials Research Society 1992

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