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11 - Dopant Profiling in Semiconductor Nanoelectronics

Published online by Cambridge University Press:  21 September 2017

T. Mitch Wallis  and
Pavel Kabos
T. Mitch Wallis
Affiliation:
National Institute of Standards and Technology, Boulder
Pavel Kabos
Affiliation:
National Institute of Standards and Technology, Boulder
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Measurement Techniques for Radio Frequency Nanoelectronics , pp. 187 - 202
Publisher: Cambridge University Press
Print publication year: 2017

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