The synergetic effects of surface smoothing exhibited during the inductively coupled plasma reactive ion etching (ICP-RIE) of free-standing polycrystalline diamonds (PCDs) were investigated. Changing the assistive gas types generated variable surface oxidation states and chemical environments that resulted in different etching rates and surface morphologies. The main reaction bond mechanism (C–O) during ICP-RIE and the ratio of C–O–C/O–C=O associated with the existence of a uniform smooth surface with root mean square (RMS) roughness of 2.36 nm were observed. An optimal process for PCD smoothing at high etching rate (4.6 μm/min) was achieved as follows: 10% gas additions of CHF3 in O2 plasma at radio frequency power of 400 W. The further etched ultra-smooth surface with RMS roughness <0.5 nm at etching rate of 0.23 μm/min that being produced by transferring this optimum recipe on single crystal diamonds with surface patterns confirmed the effectiveness of the fast smoothing approach and its feasibility for diamond surface patterning.

The TiO2 hollow spheres (TiO2HS) were successfully prepared by a hydrothermal method and added to Vulcan XC-72 carbon black as the support materials for Pd nanoparticles. A facile approach to promote ethylene glycol (EG) electrooxidation in alkaline medium was carried out by the PdBi/TiO2HS-C catalyst. The results show that Pd and Bi nanoparticles are uniformly dispersed on the surface of carbon-doped TiO2 hollow spheres, the appropriate amount of Bi modification into Pd/TiO2HS-C catalyst can enhance remarkably the electrocatalytic activity for EG oxidation, in which the PdBi/TiO2HS-C (Pd:Bi = 1:0.1) catalyst exhibits excellent stability. The high electrochemical performance is attributed to the unique structure and high surface area of the TiO2HS, metal nanoparticles uniform distribution, the electronic effect between Pd and Bi as well as the bifunctional effect between metal nanoparticles and the support TiO2HS-C. The results obtained are significant for the development of new Pd-based TiO2HS-C electrocatalysts for alcohol fuel cells.