2 results
ALD of Al2O3 for Carbon Nanotube vertical interconnect and its impact on the electrical properties
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1283 / 2011
- Published online by Cambridge University Press:
- 14 April 2011, mrsf10-1283-b10-10
- Print publication:
- 2011
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- Article
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Low Temperature Fabrication of Poly-Si TFTs using in-situ Chemically Cleaning Method
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- Journal:
- MRS Online Proceedings Library Archive / Volume 283 / 1992
- Published online by Cambridge University Press:
- 28 February 2011, 629
- Print publication:
- 1992
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- Article
- Export citation