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UV Raman Spectroscopy Study of Strain Induced by Buried Silicon Nitride Layer in the BOX of Silicon On Insulator Substrates
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1185 / 2009
- Published online by Cambridge University Press:
- 31 January 2011, 1185-II04-08
- Print publication:
- 2009
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- Article
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