4 results
Development of Electron Optics System for "ETHOS" High-Performance FIB-SEM
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- Journal:
- Microscopy and Microanalysis / Volume 24 / Issue S1 / August 2018
- Published online by Cambridge University Press:
- 01 August 2018, pp. 836-837
- Print publication:
- August 2018
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- Article
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3D Structure Fabrication by FIB Milling and Deposition
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- Journal:
- MRS Online Proceedings Library Archive / Volume 983 / 2006
- Published online by Cambridge University Press:
- 26 February 2011, 0983-LL08-08
- Print publication:
- 2006
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Fabrication of Nitrided Mask on GaAs surface and Its Machinability for STM lithography
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- Journal:
- MRS Online Proceedings Library Archive / Volume 891 / 2005
- Published online by Cambridge University Press:
- 01 February 2011, 0891-EE03-23
- Print publication:
- 2005
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Fabrication of Surface Nitridation Mask on GaAs Substrate for Nano-Lithography
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- Journal:
- MRS Online Proceedings Library Archive / Volume 843 / 2004
- Published online by Cambridge University Press:
- 01 February 2011, T3.5
- Print publication:
- 2004
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