1 results
The Strain relaxation and dislocation density of SiGe films in micron size window with different mask material grown by MBE
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 719 / 2002
- Published online by Cambridge University Press:
- 01 February 2011, F8.39
- Print publication:
- 2002
-
- Article
- Export citation