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Pressure Dependence on the Electrical Properties of SiO2 Gate Oxide Formed by Inductive Coupled Plasma Oxidation
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1287 / 2011
- Published online by Cambridge University Press:
- 15 July 2011, mrsf10-1287-f02-05
- Print publication:
- 2011
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- Article
- Export citation