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A process for creating patterns of metal-binding ligands on a variety of substrates is described. Deep UV patterning of chemisorbed ligand-bearing organosilane films creates modified surfaces that can selectively bind species such as Pd(II) via a covalent metal ion-ligand interaction. Patterned surface-bound Pd(II) is used to initiate additive electroless metallization at the catalytic sites. Metal adhesion to the substrate is controlled by the nature of the catalyst-ligand interaction.
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