1 results
Effects of Nitrogen Addition on the Properties of a-SiCN:H Films Using Hexamethyldisilazane
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 989 / 2007
- Published online by Cambridge University Press:
- 01 February 2011, 0989-A04-02
- Print publication:
- 2007
-
- Article
- Export citation