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Fabrication of DLC-Based Micro-Gear Patterns by Room-Temperature Curing Nanoimprint Lithography Using Glass-Like Carbon Molds
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1511 / 2013
- Published online by Cambridge University Press:
- 15 January 2013, mrsf12-1511-ee05-01
- Print publication:
- 2013
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- Article
- Export citation