Crystal structure of Li2SrSiO4 was reinvestigated by laboratory X-ray powder diffraction. The title compound was trigonal with space group P3121, Z=3, unit-cell dimensions a=0.502 281 (4) nm and c=1.245 520(8) nm, and V=0.272 129(3) nm3. The initial structural model was derived by the direct methods and further refined by the Rietveld method. The maximum-entropy method-based pattern fitting (MPF) method was used to confirm the validity of the structural model, in which conventional structure bias caused by assuming intensity partitioning was minimized. The final reliability indices calculated from MPF were Rwp=8.04%, S=1.22, Rp=6.01%, RB=1.50%, and RF=0.66%. Atomic arrangements of the final structural model were in excellent agreement with the three-dimensional electron-density distributions determined by MPF.

In order to obtain a controllability in the nitrogen depth profile in the oxy-nitride gate dielectrics which has been known to have a strong effect on MOS reliability, micro second ordered pulse was used for the inductive coupled plasma source in our pulse time modulated plasma. The radio frequency (RF) of source plasma and pulse frequency were 12.56 MHz and 10 kHz (100 micro second), respectively. Pulse duty ratio was varied from 20 to 100 %. 1.7nm thick thermal silicon dioxide films were subjected to the pulse time modulated plasma and analyzed by SIMS to see the depth profile of nitrogen. A new finding is that both the concentration and the peak position of nitrogen atoms in silicon dioxide films depend on the pulse duty ratio and plasma radiation time. NBTI lifetime was improved with decreased interface state density. We also used this technique to high-k material and investigated process characteristics of nitridation

A transparent magnetic particle/organic film was synthesized from an iron–organic compound. Iron(III) 3-allylacetylacetonate (IAA) was polymerized followed by in situ hydrolysis yielding an iron oxide particle/oligomer hybrid. The sizes of magnetic particles were dependent upon the hydrolysis conditions of the IAA oligomers. A nanometer-sized ferrimagnetic iron oxide particle/oligomer hybrid showed a magnetization curve with no coercive force at 300 K and that with Hc of 200 Oe at 4.2 K, respectively. The magnetization versus H/T curves at 300 and 77 K were superimposed on each other and satisfied the Langevin equation. The transparent hybrid film showed a magnetization curve at room temperature. The absorption spectrum of the film was shifted to higher energy by 0.14 eV compared with that of bulk magnetite. The absorption edge of the film was blue-shifted.

A nanocrystalline magnetic particle/oligomer hybrid was successfully synthesized by polymerization of iron(III) 3-allylacetylacetonate (IAA) followed by in situ hydrolysis. An iron oxide particle/oligomer hybrid was synthesized by hydrolysis of the IAA oligomer under alkaline and reducing conditions by the addition of hydrazine or methylhydrazine. Crystalline particles of approximately 10 nm were found to be dispersed in the oligomeric matrix. The nanocrystalline particles were identified to be iron oxide spinel by x-ray diffraction analysis and electron diffraction. The nanometer-sized ferrimagnetic iron oxide particle/oligomer hybrid showed a typical superparamagnetic behavior.

A nanocrystalline α–Fe2O3 particle/oligomer hybrid can be synthesized by polymerization of iron (III) 3-allylacetylacetonate (IAA) followed by in situ hydrolysis. The polymerization of IAA was dependent upon the polymerization temperature and solvent. GPC measurement showed that the polymerization degree of the IAA oligomer ranged from ∼3 to ∼6. The magnetic particle/oligomer hybrid was synthesized by hydrolysis of the IAA oligomer under a neutral or alkaline condition. Crystalline particles from 10 to 40 nm were finely dispersed in the oligomeric matrix, depending upon the hydrolysis conditions. The nanocrystalline particles below 10 nm in diameter were identified to be α−Fe2O3 by electron diffraction. The nanosized α−Fe2O3/oligomer hybrid was found to show superparamagnetic behavior.