Self-assembled hexagonal networks with discrete Au particles on Al2O3 (00.1) and Si (111) have been synthesized. SiOx nanowires were grown on individual Au particles using a vapor transport deposition process. The growth of SiOx nanowires was found to cover completely the surface of Au particles on Al2O3 (00.1). On the other hand, the SiOx nanowires were grown selectively on Au particles on Si (111). Interaction of Au and Si substrate is invoked to explain the difference.