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Latest applications of ToF-SIMS characterization for next-generation electronic materials
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- Journal:
- Microscopy and Microanalysis / Volume 28 / Issue S1 / August 2022
- Published online by Cambridge University Press:
- 22 July 2022, pp. 990-991
- Print publication:
- August 2022
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- Article
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Contact hole shrink and multiplication by directed self-assembly of block copolymers: from material to integration
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1750 / 2015
- Published online by Cambridge University Press:
- 16 March 2015, mrsf14-1750-kk04-03
- Print publication:
- 2015
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- Article
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