2 results
Mechanical Stress Sensors for Copper Damascene Interconnects
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1052 / 2007
- Published online by Cambridge University Press:
- 01 February 2011, 1052-DD03-01
- Print publication:
- 2007
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- Article
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Gettering by Overpressurized Bubbles Induced by High-Energy-He-Implantation In Silicon
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- Journal:
- MRS Online Proceedings Library Archive / Volume 719 / 2002
- Published online by Cambridge University Press:
- 01 February 2011, F4.2
- Print publication:
- 2002
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- Article
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