We present the data and initial results from the first pilot survey of the Evolutionary Map of the Universe (EMU), observed at 944 MHz with the Australian Square Kilometre Array Pathfinder (ASKAP) telescope. The survey covers $270 \,\mathrm{deg}^2$ of an area covered by the Dark Energy Survey, reaching a depth of 25–30 $\mu\mathrm{Jy\ beam}^{-1}$ rms at a spatial resolution of $\sim$ 11–18 arcsec, resulting in a catalogue of $\sim$ 220 000 sources, of which $\sim$ 180 000 are single-component sources. Here we present the catalogue of single-component sources, together with (where available) optical and infrared cross-identifications, classifications, and redshifts. This survey explores a new region of parameter space compared to previous surveys. Specifically, the EMU Pilot Survey has a high density of sources, and also a high sensitivity to low surface brightness emission. These properties result in the detection of types of sources that were rarely seen in or absent from previous surveys. We present some of these new results here.

We have found a class of circular radio objects in the Evolutionary Map of the Universe Pilot Survey, using the Australian Square Kilometre Array Pathfinder telescope. The objects appear in radio images as circular edge-brightened discs, about one arcmin diameter, that are unlike other objects previously reported in the literature. We explore several possible mechanisms that might cause these objects, but none seems to be a compelling explanation.

The Rapid ASKAP Continuum Survey (RACS) is the first large-area survey to be conducted with the full 36-antenna Australian Square Kilometre Array Pathfinder (ASKAP) telescope. RACS will provide a shallow model of the ASKAP sky that will aid the calibration of future deep ASKAP surveys. RACS will cover the whole sky visible from the ASKAP site in Western Australia and will cover the full ASKAP band of 700–1800 MHz. The RACS images are generally deeper than the existing NRAO VLA Sky Survey and Sydney University Molonglo Sky Survey radio surveys and have better spatial resolution. All RACS survey products will be public, including radio images (with $\sim$ 15 arcsec resolution) and catalogues of about three million source components with spectral index and polarisation information. In this paper, we present a description of the RACS survey and the first data release of 903 images covering the sky south of declination $+41^\circ$ made over a 288-MHz band centred at 887.5 MHz.

Critical dimensions in advanced semiconductor devices are now such that a significant fraction of some structures is contained within the thickness of a TEM foil. An important example is the vias used in multilevel metallization to interconnect transistors and other structures. Current generation vias have a diameter of 300 nm, and vias in devices under development are targeted at 180 nm. These dimensions are to be compared to the thickness of a TEM foil, which may be ∼50 nm. Vias are typically fabricated by etching holes in a dielectric layer, then depositing into these holes a barrier metal, such as Ta, followed by a Cu seed layer and finally Cu fill. Critical to via processing reliability are the thicknesses of barrier and seed layers. A TEM cross section of such a via will contain sharply curved layers which, when seen in projection, will lead to inaccurate measurement of layer thicknesses. Ordinary plan view preparation of these vias avoids this projection problem, but uncertainty is introduced in the height at which the via is sectioned.

We have developed an angled plan view (APV) FIB preparation technique that allows accurate measurement of barrier and seed thicknesses at discrete heights from bottom to top of a via.