2 results
Effect of Oxygen on the Degradation of Ti-Si-N Diffusion Barriers in Cu Metallization
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- Journal:
- MRS Online Proceedings Library Archive / Volume 514 / 1998
- Published online by Cambridge University Press:
- 10 February 2011, 321
- Print publication:
- 1998
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- Article
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Discovery of Long Range Order in Thin (2-20 NM) SiO2 Films by Ion Beam Analysis
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- Journal:
- MRS Online Proceedings Library Archive / Volume 510 / January 1998
- Published online by Cambridge University Press:
- 10 February 2011, 137
- Print publication:
- January 1998
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- Article
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