5 results
Atom-Probe Tomography of Semiconductor Materials and Device Structures
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- Journal:
- MRS Bulletin / Volume 34 / Issue 10 / October 2009
- Published online by Cambridge University Press:
- 02 March 2012, pp. 738-743
- Print publication:
- October 2009
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Diffusion and Defect Structure in Nitrogen Implanted Silicon
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- Journal:
- MRS Online Proceedings Library Archive / Volume 669 / 2001
- Published online by Cambridge University Press:
- 21 March 2011, J6.4
- Print publication:
- 2001
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- Article
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Effect of Nitrogen Implants on Boron Transient Enhanced Diffusion
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- Journal:
- MRS Online Proceedings Library Archive / Volume 610 / 2000
- Published online by Cambridge University Press:
- 17 March 2011, B5.9
- Print publication:
- 2000
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Transient Enhanced Diffusion and Dose Loss of Indium in Silicon
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- Journal:
- MRS Online Proceedings Library Archive / Volume 568 / 1999
- Published online by Cambridge University Press:
- 10 February 2011, 205
- Print publication:
- 1999
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The Dependence of ETCH Pit Density on the Interfacial Oxygen Levels in Thin Silicon Layers Grown by Ultra High Vacuum Chemical Vapor Deposition
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- Journal:
- MRS Online Proceedings Library Archive / Volume 259 / 1992
- Published online by Cambridge University Press:
- 25 February 2011, 467
- Print publication:
- 1992
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