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Development of Wide Bandgap Semiconductor Photonic Device Structures by Excimer Laser Micromachining
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- Journal:
- Materials Research Society Internet Journal of Nitride Semiconductor Research / Volume 5 / Issue S1 / 2000
- Published online by Cambridge University Press:
- 13 June 2014, pp. 852-858
- Print publication:
- 2000
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- Article
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Development of Wide Bandgap Semiconductor Photonic Device Structures by Excimer Laser Micromachining
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 595 / 1999
- Published online by Cambridge University Press:
- 03 September 2012, F99W11.69
- Print publication:
- 1999
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- Article
- Export citation