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Effect of Hydrogen Radical on Properties of Hydrogen in Hydrogenated Microcrystalline Silicon
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- Journal:
- MRS Online Proceedings Library Archive / Volume 609 / 2000
- Published online by Cambridge University Press:
- 17 March 2011, A6.4
- Print publication:
- 2000
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- Article
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Increase of Hydrogen-Radical Density and Improvement of The Crystalline Volume Fraction of Microcrystalline Silicon Films Prepared by Hot-Wire Assisted Pecvd Method
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- Journal:
- MRS Online Proceedings Library Archive / Volume 609 / 2000
- Published online by Cambridge University Press:
- 17 March 2011, A19.3
- Print publication:
- 2000
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- Article
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