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Atomic Layer Deposition of Gallium-Doped Zinc Oxide Transparent Conducting Oxide films
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1315 / 2011
- Published online by Cambridge University Press:
- 04 April 2011, mrsf10-1315-mm03-08
- Print publication:
- 2011
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- Article
- Export citation