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Changes in crystal structure and ferroelectric properties are investigated for (100)/(001)-oriented epitaxial PbTiO3 thin films grown on CaF2 substrates by metal organic chemical vapor deposition. In this work, PbTiO3 films, with thickness ranging from 60 to 2000 nm, presented volume fraction of (001)-oriented c-domain higher than 90%. Hence, the residual strain is smaller compared to films deposited on widely investigated SrTiO3 substrates. Additionally, more than 60 μC/cm2 remnant polarization is obtained for all film thickness ranges, and the estimated spontaneous polarization taking into account c-domain volume fraction is about 80 μC/cm2 regardless of film thickness, in good agreement with reported values for the single crystal.
Epitaxaially-grown KNbO3 thick films over 8 μm in thickness were successfully grown at 220 °C for 6 h on (100)cSrRuO3//SrTiO3 substrates by a hydrothermal method. Epitaxial SrRuO3 layers grown on (100)cSrTiO3 substrates by sputter method were used as bottom electrode layers. Relative dielectric constant and the dielectric loss were 530 and 0.11, respectively. Clear hysteresis loops originated to the ferreoelectricity were observed and a remanent polarization was 25 μC/cm2 at a maximum applied electric field of 540 kV/cm. In addition, the hydrothermal KNbO3 thick film was able to transmitting and receiving of ultrasonic waves over 50MHz.
We have studied on hydro-thermally synthesis of Pb(Ti, Zr)O3(PZT)piezoelectric polycrystalline thick film on titanium (Ti) substrate. The purpose of this study is resolving the problems for application of PZT hydrothermal polycrystalline thick film to the ultra miniature high frequency medical ultrasound array probe. The problems were the existence of pinholes in the deposited PZT film, the rough surface of that, low dielectric breakdown electric field etc. The surface of Ti substrate was pretreated to have hydrophilic property by using high reactivity of hydrogen peroxide for resolving the problems in this study. As results, hydrophilic property on the surface of Ti substrate was improved. Surface of PZT hydrothermal polycrystalline thick film without pinholes and smooth surface of that were obtained. Furthermore, the material properties like density, Young's modulus and piezoelectric constant d31 were increased by the pretreatment of Ti substrate. Consequently, dielectric breakdown electric field of PZT hydrothermal polycrystalline film was improved.
The purpose of this study was to improve deposition rate of the hydrothermal method for lead zirconate titanate (PZT) thick film on titanium substrate. We developed a high-speed rotaion substrate holder at a tangential velocity of about 0.8m/s in autoclave. A titanium substrate was fixed by the holder on the surface of a stirring bar. For the film deposition, powder of TiO2 was used instead of the liquid TiCl4. The deposition rate on titanium substrate was improved up to 7μm/24h. Piezoelectric constant d31 of the hydrothermal PZT film was -2.6 × 1011 V/m. This result was lower than that of PZT ceramics. However, this hydrothermal method obtained thick film and this film was confirmed to be polycrystalline PZT analyses of XRD and SEM. In addition, performance of thickness mode vibration of hydrothermal PZT 50μm thick film was investigated by radiating in water. The phase velocity of dilatational wave of the thickness mode vibration of the hydrothermal PZT film was 1800m/s and the electromechanical coupling factor was 47%.
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