We report the discovery of three new star clusters in the halo of the Local Group dwarf irregular galaxy NGC 6822. These clusters were found in the deep images taken with the MegaPrime at the CFHT covering a total field of 2 deg $\times$ 2 deg. The most remote cluster is found to be located as far as 79 arcmin away from the center of NGC 6822. This distance is several times larger than the size of the region in NGC 6822 where star clusters were previously found. Morphological structures of the clusters and color-magnitude diagrams of the resolved stars in the clusters show that at least two of these clusters are proabably old globular clusters.

RF MEMS(Micro-Electro-Mechanical-System) switch technology is one of powerful solution for future RF systems. This technology provides low insertion loss, High linearity and broad bandwidth. Wide driving membrane used MEMS switch can reduce driving voltage but it is easy to bend because of the stress gradient. In order to solve this problem we fabricated Au cantilever in various sputtering condition and various substrate materials. As a result of this experiment, we fabricated cantilever which was bent within 1 um, with 2 um thickness and 340 um length. We applied this condition to RF MEMS switch and we fabricated switch membrane within 1 um bend, under 10MPa stress gradient.