3 results
Effect of Particle Size During Tungsten Chemical Mechanical Polishing
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- Journal:
- MRS Online Proceedings Library Archive / Volume 566 / 1999
- Published online by Cambridge University Press:
- 10 February 2011, 103
- Print publication:
- 1999
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- Article
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Tribological Experiments Applied to Tungsten Chemical Mechanical Polishing
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- Journal:
- MRS Online Proceedings Library Archive / Volume 566 / 1999
- Published online by Cambridge University Press:
- 10 February 2011, 97
- Print publication:
- 1999
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- Article
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Abrasive Effects in Oxide Chemical Mechanical Polishing
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- Journal:
- MRS Online Proceedings Library Archive / Volume 566 / 1999
- Published online by Cambridge University Press:
- 10 February 2011, 27
- Print publication:
- 1999
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