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Pulsed DC Magnetron Sputtered Rutile TiO2 films for next generation DRAM capacitors
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1561 / 2013
- Published online by Cambridge University Press:
- 26 June 2013, mrss13-1561-cc04-07
- Print publication:
- 2013
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- Article
- Export citation