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Effect of Substrate Temperature on Hardness and Transparency of SiOC(–H) Thin Films Synthesized by Atmospheric Pressure Plasma Enhanced CVD Method
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1321 / 2011
- Published online by Cambridge University Press:
- 29 July 2011, mrss11-1321-a07-05
- Print publication:
- 2011
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- Article
- Export citation