[Ba2CuO2(CO3)]m[ACuO2]n(A=Sr) superlattices containing oxycarbonate blocks as charge reservoir have been prepared on SrTiO3 using the molecular beam epitaxy technique. First, thin films of the oxycarbonate cuprate Ba2CuO2(CO3) have been prepared on SrTiO3(001) using NO2 gas as an oxidant and CO2 gas. The films have been grown at 500°C. At higher substrate temperature or at lower CO2 pressure Ba2CuO3 was formed instead of Ba2CuO2(CO3), and the films becomes amorphous at lower temperature. X-ray diffraction and reflection high-energy electron diffraction observations indicated that (BaxSr1−x)2CuO2(CO3) grew along the  crystal orientation on SrTiO3(001) with the following epitaxial relationship: Ba2CuO2(CO3)//SrTiO3 and Ba2CuO2(CO3)//SrTiO3 . Depth profile of secondary ion mass spectrometry signals indicated the incorporation of carbon into the films. Secondly, the oxycarbonate cuprates and infinite layers have been alternately stacked. It was confirmed that Ba2CuO2(CO3)was inserted between several unit cells of SrCuO2. Electrical measurements show the as grown films to have a semiconducting behavior.