A new process, named Aerotaxy, has been developed for growth of quantum dots (QDs) with identical sizes and properties. Self-assembly and intrinsic control of the nanocrystal properties is obtained by (i) an initial selection of spherical droplets of gallium (Ga), all having identical sizes within a few %, employing standard aerosol technology. In a second processing stage (ii) these droplets of gallium are allowed to react with arsine (AsH3), by which the metallic Ga droplets are completely converted into a monodisperse ensemble of galliumarsenide (GaAs) nanocrystals at temperatures as low as 260°C. GaAs nanocrystals, of approximate diameter 10 nm, have been produced and deposited on various substrates. The good crystallinity and stoichiometry of the formed particles are confirmed by transmission electron microscopy studies of individual nanocrystals.