This work presents high sensitive detection of specific adsorption of proteins onto a silicon oxide (SiOx) surface modified by molecules with a biotinyl-end group. We fabricated a SiOx waveguide by sputtering onto a thin gold film and measured the incident angle-dependence of reflectivity using a polarized He-Ne laser under total internal reflection condition. When the s-polarized light was irradiated to the SiOx waveguide (760 nm) coupled with a prism, the incident angle-dependence of reflectivity showed narrow dips due to excitation of the waveguide mode. The waveguide surface was modified by the molecules with the biotinyl-end group as a protein probe. Specific adsorption of streptavidin in a PBS buffer solution was monitored through time course of the reflectivity change at a constant incident angle, where the waveguide mode was excited. As compared with conventional SPR system using a gold surface, high sensitive detection of the specific adsorption was achieved. Additionally, we fabricated micro-patterned arrays of biotinyl-end layers onto the SiOx waveguide surface by micro-contact printing. Then we observed the specific adsorption behavior on the micro-patterned arrays by the imaging based on the waveguide mode using a CCD camera.