To send content items to your account,
please confirm that you agree to abide by our usage policies.
If this is the first time you use this feature, you will be asked to authorise Cambridge Core to connect with your account.
Find out more about sending content to .
To send content items to your Kindle, first ensure email@example.com
is added to your Approved Personal Document E-mail List under your Personal Document Settings
on the Manage Your Content and Devices page of your Amazon account. Then enter the ‘name’ part
of your Kindle email address below.
Find out more about sending to your Kindle.
Note you can select to send to either the @free.kindle.com or @kindle.com variations.
‘@free.kindle.com’ emails are free but can only be sent to your device when it is connected to wi-fi.
‘@kindle.com’ emails can be delivered even when you are not connected to wi-fi, but note that service fees apply.
This is a copy of the slides presented at the meeting but not formally
written up for the volume.
We have developed a synchrotron-based x-ray microdiffraction technique
for measuring depth-resolved residual stress distribution in
nanocrystalline films with submicron resolution . In this study, we
further refined this technique and applied it to low-friction and
high-hardness Cu-doped MoN films. These magnetron sputtered
nanocomposites films consist of MoN, Mo2N, and Cu phases, whose ratio
depends on Cu concentration. By using the microdiffraction technique, we
discovered that both the deviatoric and the hydrostatic components of the
residual stresses depend on the film depth (Fig.1). The former indicates
depth-dependent distribution of biaxial stresses, while the latter
implies depth-dependent defect distribution, which also depends on Cu
concentration. Thermal annealing of the nanocomposite film partially
relives the stress, significantly reduces the lattice spacing, and
eliminates the defect gradients. These results suggest that interstitial
N may play an important role in the lattice expansion and the defect
gradients formed during the non-equilibrium sputtering process. Our study
provides fresh insights into understanding the structure-property
relations in the magnetron sputtered MoN:Cu nanocomposites films.
Acknowledgements This work is supported by the Department of Energy (DOE)
FreedomCAR and Vehicle Technologies Program. Use of the Advanced Photon
Source is supported by the DOE Office of Science under Contract No.
DE-AC02-06CH11357.  G. Chen, D. Singh, O. Eryilmaz, J. Routbort, B. C.
Larson, and W. Liu, Appl. Phys. Lett. 89, 172104 (2006).
Email your librarian or administrator to recommend adding this to your organisation's collection.