2 results
Fast Characterization of Silicon Membrane Structures by Laser-Doppler Vibrometry
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1052 / 2007
- Published online by Cambridge University Press:
- 01 February 2011, 1052-DD01-06
- Print publication:
- 2007
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- Article
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Implementation of a low temperature wafer bonding process for acceleration sensors
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- Journal:
- MRS Online Proceedings Library Archive / Volume 682 / 2001
- Published online by Cambridge University Press:
- 21 March 2011, N4.6
- Print publication:
- 2001
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- Article
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