2 results
FTIR study of copper agglomeration during atomic layer deposition of copper
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1155 / 2009
- Published online by Cambridge University Press:
- 31 January 2011, 1155-C11-06
- Print publication:
- 2009
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- Article
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In-situ Infrared Absorption Monitoring of Atomic Layer Deposition of Metal Oxides on Functionalized Si and Ge Surfaces
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- Journal:
- MRS Online Proceedings Library Archive / Volume 996 / 2007
- Published online by Cambridge University Press:
- 01 February 2011, 0996-H07-04
- Print publication:
- 2007
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- Article
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