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1 results

  • Application of Aluminum Nitride Thin Film for Micromachined Ultrasonic Transducers

  • Qianghua Wang, Jianzeng Xu, Changhe Huang, Gregory W Auner
  • Journal:
    MRS Online Proceedings Library Archive / Volume 892 / 2005
    Published online by Cambridge University Press:
    01 February 2011, 0892-FF13-01
    Print publication:
    2005

  • This paper reports the fabrication and characterization of micromachined ultrasonic transducers (MUT) based on piezoelectric aluminum nitride (AlN) thin films. The MUT device is composed of an Al/AlN/Al sandwiched structure overlaid on top of a silicon (Si) diaphragm. X-ray diffraction (XRD) scan shows that highly c-axis oriented AlN (002) thin films have been grown on Al/Si(100) substrates. Electrical impedance of the MUT devices is analyzed as a function of frequency. The fundamental resonant frequencies of the devices are found in the range of 65-70 kHz, which are in approximation to the theoretical calculation. The effective coupling factors of the devices are also derived as 0.18.